Growth of Self-Aligned Crystalline Cobalt Silicide Nanostructures from Co Nanoparticles
- 30 April 2004
- journal article
- research article
- Published by American Chemical Society (ACS) in The Journal of Physical Chemistry B
- Vol. 108 (22) , 6901-6904
- https://doi.org/10.1021/jp0499326
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- The growth of CoSi2 thin film in Co/W/Si(100) multilayer structuresSolid State Communications, 2003
- Polycrystalline silicon/CoSi2 Schottky diode with integrated SiO2 antifuse: a nonvolatile memory cellApplied Physics Letters, 2003
- Epitaxial growth of CoSi2 on hydrogen-terminated Si(001)Applied Physics Letters, 2003
- Ordered arrays of rare-earth silicide nanowires on Si(001)Journal of Crystal Growth, 2003
- Energetics of ultrathin CoSi2film on a Si(001) surfaceJournal of Physics: Condensed Matter, 2002
- Epitaxial CoSi2-nanostructures: an approach to Si nanoelectronicsMicroelectronic Engineering, 2002
- Regular step arrays on siliconApplied Physics Letters, 1998
- Co silicide formation on SiGeC/Si and SiGe/Si layersApplied Physics Letters, 1997
- Transition metal silicides in silicon technologyReports on Progress in Physics, 1993
- Silicides for integrated circuits: TiSi2 CoSi2Materials Science and Engineering: R: Reports, 1993