Epitaxial CoSi2-nanostructures: an approach to Si nanoelectronics
- 31 October 2002
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 64 (1-4) , 163-171
- https://doi.org/10.1016/s0167-9317(02)00781-5
Abstract
No abstract availableKeywords
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