Rate-determining reactions and surface species in CVD of silicon
- 1 July 1980
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 49 (3) , 435-444
- https://doi.org/10.1016/0022-0248(80)90117-7
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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