Surface morphology of HCl etched silicon wafers
- 1 July 1978
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 43 (6) , 659-675
- https://doi.org/10.1016/0022-0248(78)90145-8
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Surface morphology of HCl etched silicon wafersJournal of Crystal Growth, 1977
- Gas phase etching of silicon with HClJournal of Crystal Growth, 1974
- The Kinetics of Silicon Deposition on Silicon by Pyrolysis of SilaneJournal of the Electrochemical Society, 1974
- Silicon homoepitaxial thin films via silane pyrolysis: A HEED and Auger electron spectroscopy studySurface Science, 1972
- The surface morphology of epitaxial siliconJournal of Crystal Growth, 1971
- Step Motion on Crystal Surfaces. IIJournal of Applied Physics, 1969
- Surface Processes in the Growth of Silicon on (111) Silicon in Ultrahigh VacuumJournal of Applied Physics, 1968