The effect of heavy doping on the diffusion of impurities in silicon
- 1 February 1966
- journal article
- Published by Elsevier in Journal of Physics and Chemistry of Solids
- Vol. 27 (2) , 315-325
- https://doi.org/10.1016/0022-3697(66)90038-2
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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