Erzeugung verschleißmindernder Randschichten durch Ionenstrahlverfahren
- 1 March 1993
- journal article
- Published by Wiley in Materialwissenschaft und Werkstofftechnik
- Vol. 24 (3-4) , 109-119
- https://doi.org/10.1002/mawe.19930240309
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Modification of chemical properties of materials by ion beam mixing and ion beam assisted depositionJournal of Vacuum Science & Technology A, 1992
- Are coatings produced by ion-beam-assisted deposition superior? A comparison of chemical and mechanical properties of steel coated using different deposition techniquesSurface and Coatings Technology, 1992
- ALLIGATOR−An apparatus for ion beam assisted deposition with a broad-beam ion sourceReview of Scientific Instruments, 1992
- Production of mixed metal–gas and pure metal ion beams with an electrodeless rf ion source in the low keV regimeReview of Scientific Instruments, 1992
- Ion beam assisted deposition of insulating layersNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992
- High dose, low energy implantation of nitrogen in silicon, niobium and aluminiumSurface and Coatings Technology, 1991
- Formation of intrinsic oxide layers by ion implantation of silicon and titanium in the low kiloelectronvolt regimeMaterials Science and Engineering: A, 1991
- Modification of mechanical and chemical properties of thin films by ion bombardmentSurface and Coatings Technology, 1990
- Modification of chemical properties by ion beam mixing techniquesVacuum, 1989
- X-ray photoelectron spectroscopy of ion beam sputter deposited SiO2, TiO2, and Ta2O5Journal of Vacuum Science & Technology A, 1984