Local selective homoepitaxy of silicon at reduced temperatures using a silicon-iodine transport system
- 1 December 1978
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 45, 118-125
- https://doi.org/10.1016/0022-0248(78)90422-0
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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