Vacancies in He-implanted 4H and 6H SiC epilayers studied by positron annihilation
- 1 December 2001
- journal article
- Published by Elsevier in Physica B: Condensed Matter
- Vol. 308-310, 660-663
- https://doi.org/10.1016/s0921-4526(01)00783-9
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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