Multilayer gratings for the soft x-ray region (invited)
- 1 January 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (1) , 1399-1403
- https://doi.org/10.1063/1.1143026
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Dynamical theory of diffraction at in-depth multilayered gratingsJournal of Optics, 1991
- Reactive ion etching of multilayer mirrors for X-ray projection lithography masksMicroelectronic Engineering, 1991
- Overview of soft-x-ray photoemission spectromicroscopyNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990
- Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm gratingPhysica Scripta, 1990
- Multilayer diffraction gratings: application to synchrotron radiation instrumentationOptical Engineering, 1990
- The Use Of Multilayer Diffraction Gratings In The Determination Of X-Ray, Soft X-Ray, And Vuv Elemental Scattering Cross-SectionsPublished by SPIE-Intl Soc Optical Eng ,1988
- Multilayer-coated mirrors as power filters in synchrotron radiation beamlinesNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988
- Soft X-Ray Beamsplitters And Highly Dispersive Multilayer Mirrors For Use As Soft X-Ray Laser Cavity ComponentsPublished by SPIE-Intl Soc Optical Eng ,1987