Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method
- 31 December 2000
- journal article
- Published by Autonomous Non-profit Organization Editorial Board of the journal Uspekhi Khimii in Russian Chemical Reviews
- Vol. 69 (12) , 1057-1082
- https://doi.org/10.1070/rc2000v069n12abeh000572
Abstract
No abstract availableKeywords
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