Diamond MEMS — a new emerging technology
- 1 March 1999
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 8 (2-5) , 934-940
- https://doi.org/10.1016/s0925-9635(98)00294-5
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
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