A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
- 1 November 2007
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 145-146, 371-379
- https://doi.org/10.1016/j.sna.2007.10.068
Abstract
No abstract availableKeywords
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