Mechanical characterization of suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique
- 23 January 2006
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (4) , 041913
- https://doi.org/10.1063/1.2167813
Abstract
The mechanical properties of high-quality suspended GaN microstructures fabricated by GaN-on-patterned-silicon technique are characterized. Micro-Raman scattering is used to study the stress distribution in the GaN microstructures, and the measured results show that the stress in GaN microbeams decreases 47% when the silicon underneath the microbeams is removed. Microbeam bending test is used to measure the Young’s modulus of GaN films grown on silicon (111) substrate, yielding a Young’s modulus of 330 GPa.Keywords
This publication has 24 references indexed in Scilit:
- Pressure-induced changes in the conductivity of AlGaN∕GaN high-electron mobility-transistor membranesApplied Physics Letters, 2004
- GaN-based diodes and transistors for chemical, gas, biological and pressure sensingJournal of Physics: Condensed Matter, 2004
- A Critical Review of Microscale Mechanical Testing Methods Used in the Design of Microelectromechanical SystemsExperimental Mechanics, 2003
- Stress and its effect on optical properties of GaN epilayers grown on Si(111), 6H-SiC(0001), and c-plane sapphireApplied Physics Letters, 2003
- Nanoindentation of epitaxial GaN filmsApplied Physics Letters, 2000
- Mechanical properties of the GaN thin films deposited on sapphire substrateJournal of Crystal Growth, 1998
- Brillouin scattering study of gallium nitride: elastic stiffness constantsJournal of Physics: Condensed Matter, 1997
- Thermal stress in GaN epitaxial layers grown on sapphire substratesJournal of Applied Physics, 1995
- Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin filmsJournal of Materials Research, 1988
- An ultra high vacuum system for thin dielectric film deposition at low temperaturesJournal of Materials Research, 1988