Fabrication of Large‐Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks
- 30 June 2003
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 15 (13) , 1065-1068
- https://doi.org/10.1002/adma.200304824
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- A spacer patterning technology for nanoscale CMOSIEEE Transactions on Electron Devices, 2002
- Improving stamps for 10 nm level wafer scale nanoimprint lithographyMicroelectronic Engineering, 2002
- Imprints offer MooreNature, 2002
- Ultrafast and direct imprint of nanostructures in siliconNature, 2002
- Protein Nanoarrays Generated By Dip-Pen NanolithographyScience, 2002
- Nanoimprint lithography: challenges and prospectsNanotechnology, 2001
- Patterning sub-30-nm MOSFET gate with i-line lithographyIEEE Transactions on Electron Devices, 2001
- Opal chips: vectorial growth of colloidal crystal patterns inside silicon wafersChemical Communications, 2000
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996
- Nanosphere lithography: A materials general fabrication process for periodic particle array surfacesJournal of Vacuum Science & Technology A, 1995