EPR and RBS study of defects produced by MeV ion implantation into silicon
- 1 January 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 62 (3) , 384-387
- https://doi.org/10.1016/0168-583x(92)95261-o
Abstract
No abstract availableKeywords
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