Interaction of megaelectronvolt ion beams with silicon: Amorphization, recrystallization and diffusion
- 28 February 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 2 (1-3) , 41-47
- https://doi.org/10.1016/0921-5107(89)90074-3
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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