In-situ doping and composition monitoring for molecular beam epitaxy using mass spectroscopy of recoiled ions (MSRI)
- 2 February 1993
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 127 (1-4) , 972-975
- https://doi.org/10.1016/0022-0248(93)90770-w
Abstract
No abstract availableKeywords
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