Microcrystalline silicon carbon alloy film prepared by photo-chemical vapour deposition
- 1 June 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 245 (1-2) , 249-254
- https://doi.org/10.1016/0040-6090(94)90906-7
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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