Negative-ion sources for modification of materials (invited)
- 1 March 1996
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (3) , 1410-1415
- https://doi.org/10.1063/1.1146682
Abstract
The properties of negative ions, such as charging–free ion implantation and new materials syntheses by pure kinetic bonding reaction, have been shown to be promising in terms of their interaction with material surfaces. However, high‐current or high‐brightness negative‐ion sources are required for these purposes. Several kinds of sputter‐type negative‐ion sources have been developed for negative‐ion implantation and deposition in order to obtain high‐current heavy negative ions. Recently, a microwave discharge oxygen negative‐ion source for negative‐ion beam deposition and a surface plasma type hydrogen negative‐ion source for projection ion‐beam lithography have been investigated. In this article, these negative‐ion sources for modification of materials are reviewed.Keywords
This publication has 13 references indexed in Scilit:
- Negative-ion implantation techniqueNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1995
- H− beam based projection microlithography: A conceptual study of the beam parametersa)Review of Scientific Instruments, 1994
- Negative-ion source for implantation and surface interaction of negative-ion beams (invited)Review of Scientific Instruments, 1994
- Applications of negative-ion beamsSurface and Coatings Technology, 1994
- Measurement of heavy negative ion production probabilities by sputteringAIP Conference Proceedings, 1992
- Method for calibrating resonant-mass gravitational wave detectorsReview of Scientific Instruments, 1990
- A versatile high intensity negative ion sourceNuclear Instruments and Methods in Physics Research, 1984
- A PIG Sputter Source for Negative IonsIEEE Transactions on Nuclear Science, 1975
- A sputter PIG source (SPIGS) for negative ionsNuclear Instruments and Methods, 1975
- A survey of negative ion sources for tandem acceleratorsNuclear Instruments and Methods, 1974