Vom „Ansprengen”︁ zum „Absprengen”︁: Smart-cut und Smarter-cut als elegante Methoden zum übertragen einkristalliner Halbleiterschichten
Open Access
- 1 January 1999
- journal article
- aus der-wissenschaft
- Published by Wiley in Physikalische Blätter
- Vol. 55 (1) , 51-53
- https://doi.org/10.1002/phbl.19990550115
Abstract
No abstract availableKeywords
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