Beam Deviation Errors in Ellipsometric Measurements; an Analysis
- 1 August 1974
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 13 (8) , 1938-1945
- https://doi.org/10.1364/ao.13.001938
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 17 references indexed in Scilit:
- Sensitivity of the Ellipsometric Parameters to Angle-of-Incidence VariationsApplied Optics, 1974
- High Precision Alignment Procedure for an EllipsometerApplied Optics, 1974
- Effects of component imperfections on ellipsometer calibrationJournal of the Optical Society of America, 1973
- Measurement and Correction of First-Order Errors in EllipsometryJournal of the Optical Society of America, 1971
- The effects of polarizer ellipticity on ellipsometry measurementsSurface Science, 1970
- Analyses and Corrections of Instrumental Errors in EllipsometryJournal of the Optical Society of America, 1970
- The accuracy of the measurement of the ellipsometric parameters Δ and ψSurface Science, 1969
- A theoretical and experimental analysis of the ellipsometerSurface Science, 1969
- Exact Theory of Retardation Plates*Journal of the Optical Society of America, 1964
- Performance and Testing of Polarizing PrismsJournal of Scientific Instruments, 1949