Spacer FinFET: nanoscale double-gate CMOS technology for the terabit era
- 19 March 2002
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 46 (10) , 1595-1601
- https://doi.org/10.1016/s0038-1101(02)00111-9
Abstract
No abstract availableKeywords
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