Plasma etching: principles, mechanisms, application to micro- and nano-technologies
- 1 September 2000
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 164 (1-4) , 72-83
- https://doi.org/10.1016/s0169-4332(00)00328-7
Abstract
No abstract availableThis publication has 28 references indexed in Scilit:
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