Chemical vapour deposition of titanium chalcogenides and pnictides and tungsten oxide thin films
- 30 January 2006
- journal article
- Published by Royal Society of Chemistry (RSC) in New Journal of Chemistry
- Vol. 30 (4) , 505-514
- https://doi.org/10.1039/b513177d
Abstract
This perspective article focuses on the formation of titanium chalcogenides and pnictides and tungsten oxides by chemical vapour deposition. Attention is focused on the role of the precursor and on the different microstructures that can be produced under different conditions.Keywords
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