Tin doped indium oxide thin films: Electrical properties
- 1 March 1998
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 83 (5) , 2631-2645
- https://doi.org/10.1063/1.367025
Abstract
Tin doped indium oxide (ITO) films are highly transparent in the visible region, exhibiting high reflectance in the infrared region, and having nearly metallic conductivity. Owing to this unusual combination of electrical and optical properties, this material is widely applied in optoelectronic devices. The association of these properties in a single material explains the vast domain of its applicability and the diverse production methods which have emerged. Although the different properties of tin doped indium oxide in the film form are interdependent, this article mainly focuses on the electrical aspects. Detailed description of the conduction mechanism and the main parameters that control the conductivity is presented. On account of the large varieties and differences in the fabrication techniques, the electrical properties of ITO films are discussed and compared within each technique.This publication has 170 references indexed in Scilit:
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