The analysis of thin epitaxial layers of GaAs using MeV α-particles
- 16 June 1973
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 17 (2) , K143-K147
- https://doi.org/10.1002/pssa.2210170252
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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- An instrument for the rapid determination of semiconductor impurity profilesJournal of Physics E: Scientific Instruments, 1971