Ultrathin Single Crystal CoSi2 Layers on Si(111) and Si(100)
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Structural analysis of an Si/CoSi2/Si heterostructure using ultrahigh resolution transmission electron microscopyThin Solid Films, 1986
- GROWTH AND CHARACTERIZATION OF EPITAXIAL Si/CoSi2 AND Si/CoSi2/Si HETEROSTRUCTURESMRS Proceedings, 1985
- Liquid phase growth of epitaxial Ni and Co silicidesApplied Physics Letters, 1983
- Direct determination of atomic structure at the epitaxial cobalt disilicide on (111) Si interface by ultrahigh resolution electron microscopyApplied Physics Letters, 1982