X-Ray Diffraction Microscopy of Planar Diffused Junction Structures
- 1 January 1967
- book chapter
- Published by Springer Nature
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
- X-Ray Extinction Contrast Topography of Silicon Strained by Thin Surface FilmsJournal of Applied Physics, 1965
- New X-Ray Diffraction Microscopy Technique for the Study of Imperfections in Semiconductor CrystalsJournal of Applied Physics, 1965
- A NEW SCANNING-REFLECTION X-RAY TOPOGRAPHIC METHODApplied Physics Letters, 1965
- Determination of Stress in Films on Single Crystalline Silicon SubstratesReview of Scientific Instruments, 1965
- Rates of Formation of Thermal Oxides of SiliconJournal of the Electrochemical Society, 1964
- Selective Epitaxial Deposition of SiliconNature, 1962
- X-Ray Observations of Diffusion-Induced Dislocations in SiliconJournal of Applied Physics, 1962
- Studies of Individual Dislocations in Crystals by X-Ray Diffraction MicroradiographyJournal of Applied Physics, 1959
- Method for the Detection of Dislocations in Silicon by X-Ray Extinction ContrastPhysical Review B, 1958
- Surface Protection and Selective Masking during Diffusion in SiliconJournal of the Electrochemical Society, 1957