Laser-Assisted Selective Chemical Etching of GaAs/AlGaAs Layered Structures
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Composition-selective photochemical etching of compound semiconductorsApplied Physics Letters, 1985
- Deep-ultraviolet induced wet etching of GaAsApplied Physics Letters, 1984
- Integrated Optics: Theory and TechnologyPublished by Springer Nature ,1984
- Laser-controlled etching of chromium-doped 〈100〉 GaAsApplied Physics Letters, 1983
- Selective Dry Etching of AlGaAs-GaAs HeterojunctionJapanese Journal of Applied Physics, 1981
- Thin Film ProcessesJournal of the Electrochemical Society, 1980
- The Anodization of GaAs and GaP in Aqueous SolutionsJournal of the Electrochemical Society, 1976