Growth-mode-specific intrinsic stress of thin silver films
- 15 August 1991
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 44 (7) , 3369-3372
- https://doi.org/10.1103/physrevb.44.3369
Abstract
The growth and morphology of thin films are directly related to their intrinsic stress. In the system silver on mica (001) three different Vollmer-Weber-type growth modes were clearly distinguished by in situ intrinsic-stress measurements, using a very sensitive cantilever beam device. For epitaxial silver films, a stress contribution due to the formation of single crystalline domain walls is observed.Keywords
This publication has 22 references indexed in Scilit:
- Mechanical stresses in (sub)monolayer epitaxial filmsPhysical Review Letters, 1990
- Columnar growth in thin filmsPhysical Review Letters, 1988
- Stresses and deformation processes in thin films on substratesCritical Reviews in Solid State and Materials Sciences, 1988
- The influence of O2, H2, H2O, N2, CO and CH4 on the structure of thin silver films investigated by ultrahigh vacuum internal stress measurementsThin Solid Films, 1982
- Internal stresses in metallic films deposited by cylindrical magnetron sputteringThin Solid Films, 1979
- Electron microscope structure and internal stress in thin silver and gold films deposited onto MgF2 and SiO substratesThin Solid Films, 1979
- Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substratesThin Solid Films, 1978
- Stresses in thin films: The relevance of grain boundaries and impuritiesThin Solid Films, 1976
- Misfit dislocations and the alignment of epitaxial islandsSurface Science, 1972
- Grain Growth and Stress Relief in Thin FilmsJournal of Vacuum Science and Technology, 1972