Ultra-High-Resolution electron-beam lithography
- 1 January 1985
- journal article
- research article
- Published by Wiley in Journal of Electron Microscopy Technique
- Vol. 2 (2) , 147-155
- https://doi.org/10.1002/jemt.1060020206
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- I n s i t u vaporization of very low molecular weight resists using 1/2 nm diameter electron beamsJournal of Vacuum Science and Technology, 1981