MOCVD Growth of GaAs1-xPx (x=0-1) and Fabrication of GaAs0.6P0.4 LED on Si Substrate

Abstract
Single-crystalline GaAs1-x P x (x=0-1) layers were grown on (100)2° off Si substrates by metal-organic chemical vapor deposition using GaP and superlattices as intermediate layers. A very smooth mirror-like surface was obtained in the range x=0-0.4. Light-emitting diodes emitting at 655 nm have been fabricated in the GaAs0.6P0.4 layer on a Si substrate.