Possible applications of tantalum silicide for very-large-scale integration technology
- 1 June 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 140 (1) , 131-136
- https://doi.org/10.1016/0040-6090(86)90167-7
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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