Quartz crystal monitoring for optical thin films
- 1 November 1969
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 4 (5) , R39-R42
- https://doi.org/10.1016/0040-6090(69)90102-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Influence of Substrate Temperature on the Condensation of Vacuum Evaporated Films of MgF2 and ZnSJournal of Vacuum Science and Technology, 1969
- Problems Encountered During Deposition of Optical Thin Films with Reproducible Characteristics in an Automatic CoaterJournal of Vacuum Science and Technology, 1969
- Factors influencing the accuracy of a quartz-crystal-oscillator as a thickness monitor for thin film depositionThin Solid Films, 1968
- A versatile thin film thickness monitor of high accuracyJournal of Scientific Instruments, 1967
- Role of Condensation Phenomena in the Measurement of Film Thickness by the Oscillating Quartz Crystal MethodJournal of Applied Physics, 1966
- Thin Dielectric Layers Technology using Vacuum Deposition with Piezoelectric Crystal Rate ControlApplied Optics, 1965