Analysis of the stress-induced leakage current and related trap distribution
- 13 December 1999
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 75 (24) , 3871-3873
- https://doi.org/10.1063/1.125484
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Stress-induced leakage current in ultrathin SiO2 filmsApplied Physics Letters, 1994