On the adsorption‐ and equilibrium‐referred interpretation of the doping element incorporation during the growth of CVD epitaxial silicon
- 1 January 1983
- journal article
- Published by Wiley in Crystal Research and Technology
- Vol. 18 (11) , 1377-1384
- https://doi.org/10.1002/crat.2170181112
Abstract
No abstract availableKeywords
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