Observation of Atomic Structure by Scanning Tunneling Microscopy of Vicinal Si(100) Surface Annealed in Hydrogen Gas
- 1 November 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (11B) , L1571-1573
- https://doi.org/10.1143/jjap.33.l1571
Abstract
This paper reports on the atomic structure and adsorbed species on a vicinal Si(100) surface annealed in H2. Annealing was carried out at 1000–1200°C under the H2 pressure of 4–7 Torr. The annealing in ultrahigh vacuum (UHV) was also carried out for comparison. Reconstruction structures of 2×1 and 1×2 were found by scanning tunneling microscopy (STM) for the surface annealed in H2 as well as that in UHV. The most obvious difference of the H2-annealed surface from the UHV-annealed one is a large retreat of S A steps resulting in promotion of a biatomic step formation. Thermal desorption spectroscopy indicated the presence of a monohydride phase on the H2-annealed surface, which is consistent with the 2×1 structure observed by STM.Keywords
This publication has 12 references indexed in Scilit:
- Observation of Atomic Steps on Vicinal Si(111) Annealed in Hydrogen Gas Flow by Scanning Tunneling MicroscopyJapanese Journal of Applied Physics, 1993
- Low-Temperature Substrate Annealing of Vicinal Si(100) for Epitaxial Growth of GaAs on SiJapanese Journal of Applied Physics, 1991
- The importance of structure and bonding in semiconductor surface chemistry: hydrogen on the Si(111)-7 × 7 surfaceSurface Science, 1991
- Structure of the H-saturated Si(100) surfacePhysical Review Letters, 1990
- Finite-temperature phase diagram of vicinal Si(100) surfacesPhysical Review Letters, 1990
- Effects of surface hydrogen on the air oxidation at room temperature of HF-treated Si (100) surfacesApplied Physics Letters, 1990
- Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphologyJournal of Vacuum Science & Technology A, 1989
- Stabilities of single-layer and bilayer steps on Si(001) surfacesPhysical Review Letters, 1987
- Surface Infrared Study of Si(100)-(2×1)HPhysical Review Letters, 1984
- Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1Physical Review B, 1976