Micro-RBS Analysis of Masklessly Fabricated Structures

This publication has 8 references indexed in Scilit:

• Optimization in Spot Sizes of Focused MeV Ion Beam by Precise Adjustment of Lens-Current Excitations
  Japanese Journal of Applied Physics, 1988
• muprobe using focused 1.5 MeV helium ion and proton beams
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
• Microbeam line with 1.5 MeV helium ions and protons at Osaka
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
• Microanalysis by Focused MeV Helium Ion Beam
  Japanese Journal of Applied Physics, 1987
• 200 kV Mass-Separated Fine Focused Ion Beam Apparatus
  Japanese Journal of Applied Physics, 1985
• Maskless Dry Etching of Gallium Arsenide with a Submicron Line-Width by Laser Pyrolysis in CCl₄ Gas Atmosphere
  Japanese Journal of Applied Physics, 1984
• Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams
  Japanese Journal of Applied Physics, 1984
• A review of laser–microchemical processing
  Journal of Vacuum Science & Technology B, 1983