Silicon micro-transducers
- 1 December 1981
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 14 (12) , 1343-1352
- https://doi.org/10.1088/0022-3735/14/12/001
Abstract
By means of silicon planar technology it is possible to make not only integrated circuits but also integrated sensors and actuators. This paper gives a comprehensive review of research work in the sensor area. It also includes some general considerations with respect to measurement systems and signal conversion as well as some conclusions and comments on a future outlook.Keywords
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