Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation
- 1 January 1992
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 54, 353-357
- https://doi.org/10.1016/0169-4332(92)90070-e
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen-containing atmosphereJournal of Applied Physics, 1991
- Nitridation of titanium by multipulse excimer laser irradiationApplied Surface Science, 1990
- Nitridation induced on metal surface by Ar+-ion impact under N2 atmosphereVacuum, 1990
- Nitriding of bulk titanium and thin titanium films in a NH3 low pressure plasmaApplied Surface Science, 1989
- Laser synthesis of metal silicidesApplied Physics A, 1988
- Performance of titanium nitride diffusion barriers in aluminum–titanium metallization schemes for integrated circuitsJournal of Vacuum Science & Technology A, 1985
- Algorithms for the rapid simulation of Rutherford backscattering spectraNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Barrier layers: Principles and applications in microelectronicsJournal of Vacuum Science & Technology A, 1984
- Simultaneous nuclear microanalysis of nitrogen and oxygen on siliconNuclear Instruments and Methods in Physics Research, 1982