Model of silicon epitaxial growth in SiCl4-HCl-H2 system based on flow graph
- 1 March 1979
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 46 (3) , 362-370
- https://doi.org/10.1016/0022-0248(79)90084-8
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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