Measurement of intrinsic stresses during growth of aluminum nitride thin films by reactive sputter deposition
- 15 August 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (4) , 2411-2414
- https://doi.org/10.1063/1.354701
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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