Investigation of room-temperature ion beam hydrogenation for the removal of traps in silicon ion beam damaged metal-oxide-silicon structures
- 1 March 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 73 (5) , 2187-2195
- https://doi.org/10.1063/1.353121
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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