Target chambers for ion implantation using mechanical scanning
- 1 October 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 189 (1) , 239-251
- https://doi.org/10.1016/0029-554x(81)90151-8
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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- Features of a high-current implanter and a medium-current implanterJournal of Vacuum Science and Technology, 1976
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