Effectiveness of AlN encapsulant in annealing ion-implanted SiC
- 15 July 1999
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 86 (2) , 746-751
- https://doi.org/10.1063/1.370798
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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