Residual Compression in Ni Film Prepared by Laser Ablation
- 1 January 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (1B) , L129
- https://doi.org/10.1143/jjap.33.l129
Abstract
Large residual compression with the value of (3∼4)109 N/m2 has been observed in Ni films prepared by the laser ablation method using a YAG laser. The origin of compression has been discussed based on the results of X-ray diffraction, streak image of ablated particles and spectrum of the plume. These experiments showed that excited Ni atoms combined with nitrogen remaining in the vacuum chamber and formed nitride ( Ni3N) which caused compression in the film.Keywords
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