Characterizing hot-carrier transport in silicon heterostructures with the use of ballistic-electron-emission microscopy

Abstract
High-energy (0.1–1 eV) measurements of ballistic carrier transport in semiconductors have been performed using a new ballistic-electron-emission microscopy (BEEM) technique. Hot-electron attenuation lengths for p-type Si have been determined by combining precise Si molecular-beam-epitaxy methods with BEEM. A striking anomaly has been observed in the comparison of the 293- and 77-K results.