Diffusion, activation, and regrowth behavior of high dose P implants in Ge
- 17 April 2006
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (16)
- https://doi.org/10.1063/1.2196227
Abstract
Time evolution of the chemical profile, electrical activity, and regrowth of P implanted in Ge at a concentration above the maximum equilibrium solubility is investigated at 500°C rapid thermal annealing temperature. During the first anneal, a second, epitaxial regrowth of a part of the amorphous layer leads to P trapping in substitutional sites at a level of about 4×1020atoms∕cm3. However, nonsubstitutional P atoms frozen in the crystal at high concentration during recrystallization form large, inactive precipitates of peculiar circular shape. Simultaneously, long annealing time leads to continuing, extensive P out- and indiffusion affecting both the P chemical profile and junction sheet resistance.Keywords
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