From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry
- 5 August 2003
- journal article
- design note
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 14 (9) , N59-N63
- https://doi.org/10.1088/0957-0233/14/9/402
Abstract
This feasibility study investigates the potential combination of an x-ray interferometer and optical interferometer as a one-dimensional long range high resolution scanning stage for an atomic force microscope (AFM) in order to overcome the problems of non-linearity associated with conventional AFMs and interferometers. Preliminary results of measurements of the uniformity of the period of a grating used as a transfer standards show variations in period at the nanometre level.Keywords
This publication has 15 references indexed in Scilit:
- Intercomparison of scanning probe microscopesPrecision Engineering, 2002
- A review of recent work in sub-nanometre displacement measurement using optical and X–ray interferometryPhilosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 2002
- Advances in traceable nanometrology at the National Physical Laboratory†Nanotechnology, 2000
- Real-time, interferometrically measuring atomic force microscope for direct calibration of standardsReview of Scientific Instruments, 1999
- Long-range AFM profiler used for accurate pitch measurementsMeasurement Science and Technology, 1998
- Industrial Uses of STM and AFMCIRP Annals, 1997
- Laser interferometric diffractometry for measurements of diffraction grating spacingApplied Optics, 1996
- Design and three dimensional calibration of a measuring scanning tunneling microscope for metrological applicationsReview of Scientific Instruments, 1994
- Residual errors in laser interferometry from air turbulence and nonlinearityApplied Optics, 1987
- Surface Studies by Scanning Tunneling MicroscopyPhysical Review Letters, 1982