Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications

This publication has 8 references indexed in Scilit:

• Processing of PZT piezoelectric thin films for microelectromechanical systems
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Application of MEMS technology in automotive sensors and actuators
  Proceedings of the IEEE, 1998
• Etching effects to PZT capacitors with RuO_x/Pt electrode by using inductively coupled plasma
  Integrated Ferroelectrics, 1997
• Pt/Ti/SiO₂/Si substrates
  Journal of Materials Research, 1995
• High-Temperature Etching of PZT/Pt/TiN Structure by High-Density ECR Plasma
  Japanese Journal of Applied Physics, 1995
• Direct evaluation of domain-wall and intrinsic contributions to the dielectric and piezoelectric response and their temperature dependence on lead zirconate-titanate ceramics
  Journal of Applied Physics, 1994
• Reactive Ion Etching of Sputtered PbZr_1-xTi_xO₃ Thin Films
  Japanese Journal of Applied Physics, 1992
• An experimental 512-bit nonvolatile memory with ferroelectric storage cell
  IEEE Journal of Solid-State Circuits, 1988